Overlay OL-700n

> Products > Overlay > OL-700n

Auros Technology has just released the latest model of overlay metrology system to more satisfy the customers' demands. As the technology node is getting smaller and the margin of process control is tighter, it is getting difficult for customers to cope with accuracy, process management, productivity etc. In order to provide the best solutions for accuracy, yield enhancement, fab operation, and productivity, OL-700n is made with our own technology. This model offers improved performances and is applied to the most advanced devices in the world. As this system is faster than the previous model, it helps customers with throughput and productivity. This third generation of overlay metrology system is much more powerful in every aspect compared to OL-600n.

Features

  • Best accuracy
  • High precision
  • High resolution pattern recognition
  • High system reliability
  • Yield improvement
  • Accurate Overlay Control (AOC)
  • Process monitoring
  • Data analysis tool (EUREKA)
  • Auto Recipe Optimization (ARO)
  • ARO manager (recipe converter)
  • High throughput

Applications

  • Overlay metrology for high-end process devices (up to 1y nm nodes)
  • Measurement for FEOL/MEOL/BEOL
  • Data analysis and management
  • 300mm (12") wafers in semiconductor fabs

Related Products

OPEN +

Careers

반도체 계측/검사장비Software Engineer

Submit