Overlay OL-600n

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The OL-600n is an overlay metrology system with Auros' unique and innovative technology, which provides optimum performance for the 2X/1Xnm nodes. This advanced system, in particular, offers enhanced precision, TMU(Total Measurement Uncertainty) and MAM(Move-Acquire-Measure) time for high accuracy and fast throughput. The OL-600n is also seamlessly integrated with an advanced inline data analyzer ,named EUREKA, which enables users to collect measurement data during the production for monitoring process variation and analyzing measurement data in an user-friendly manner. In addition to these characteristics, this system has a smaller platform than the previous model(OL-300n), generating the increase in the utilization of fab space.

Features

  • Best accuracy
  • High precision
  • High resolution pattern recognition
  • High system reliability
  • Yield improvement
  • Process monitoring
  • Data analysis tool (EUREKA)
  • Auto Recipe Optimization (ARO)
  • ARO manager (recipe converter)
  • High throughput
  • Low CoO (Cost of Ownership)

Applications

  • Overlay metrology for high-end process devices (up to 2z/1x nm nodes)
  • Measurement for FEOL/MEOL/BEOL
  • Data analysis and management
  • 300mm (12”) wafers in semiconductor fabs

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