Overlay OL-300n

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The OL-300n is the first generation of overlay metrology system manufactured by Auros Technology. This equipment was designed to provide the best solution for process control with overlay measurement. Now it still plays an important role for the fabs up to 2xnm nodes. This system is the only solution for overlay metrology from 3z to 9xnm design device currently in terms of throughput, reliability, CoO and service support. This equipment is also characterized by its simple and quick compatibility with various types of scanners. The automatic function for process optimization not only maximizes user convenience but also guarantees stable repeatability at a high level.

Features

  • High accuracy
  • High precision
  • High resolution pattern recognition
  • High system reliability
  • Process monitoring
  • Data analysis tool (EUREKA)
  • Auto Recipe Optimization (ARO)
  • ARO manager (recipe converter)
  • High throughput
  • Low CoO (Cost of Ownership)

Applications

  • Overlay metrology for the devices from 3z to 9x nm nodes
  • Measurement for FEOL/MEOL/BEOL
  • Data analysis and management
  • 300mm (12”) wafers in semiconductor fabs

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