HE-900ir is a Bonding Overlay measuring equipment using IR light sources based on AUROS Technology's Overlay source technology.
It is optimized for measuring precise Wafer-to-Wafer alignment and placement accuracy for Cu-Cu connection using IR Overlay system during hybrid bonding process.
- High Throughput
- High Speed Dual Z-Axis Stage
- Data analysis and management
- 12inch automation compatible
- Standalone System