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HE-900ir

HE-900ir is a Bonding Overlay measuring equipment using IR light sources based on AUROS Technology's Overlay source technology.

It is optimized for measuring precise Wafer-to-Wafer alignment and placement accuracy for Cu-Cu connection using IR Overlay system during hybrid bonding process.

  • High Throughput
  • High Speed Dual Z-Axis Stage
  • Data analysis and management
  • 12inch automation compatible
  • Standalone System
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