The OL-1000n is AUROS Technology's 6th Generation High-end Overlay measuring equipment that adds and improves H/W upgrade and its own algorithmic development and S/W capabilities, providing approximately a 10% improvement over previous generation models in terms of accuracy and measurement speed.

OL-1000n is a product for overlay measurement and data management of semiconductor memory (DRAM, NAND) and logic products, and specializes in measurement in High Stack and Opaque Layer.