OL-100n is the 8-inch overlay metrology equipment of AUROS Technology. It is an independently developed equipment of our company to prepare for the increased demand of the legacy process. Developed based on the 12-inch overlay metrology technique, OL-100n features an excellent performance compared to other similar equipment in the market.

It is possible to measure the overlay and CD and equipped with rapid measurement speed and usage convenience.

Along with the existing 6/8-inch overlay market, OL-100n can be applied to the compound semiconductor overlay measurement that has been showing explosive growth. In addition to the power devices such as IGBT and MOSFET that use Si, it is possible to apply OL-100n to produce the overlay measurement that uses the substrate of GaAs which is applied to SiC and GaN-based products for electric cars and 5G.