OL-900n is the 5th generation overlay metrology equipment of AUROS Technology, and it was developed to be suitable for device manufacturing technology demands of the customers through the high-precision process control and rapid measurement speed.

OL-900n is a product for the overlay measurement and data management of the semiconductor memories (DRAM, NAND) and logic products.

The precise pattern matching algorithm and high-precision stage technology monitor the performance lithography equipment to provide accurate feedback to the engineers.